Invention Grant
- Patent Title: Semiconductor-device manufacturing method and manufacturing apparatus
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Application No.: US16482246Application Date: 2018-01-30
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Publication No.: US10937758B2Publication Date: 2021-03-02
- Inventor: Tomonori Nakamura , Takehito Shimatsu , Miyuki Uomoto
- Applicant: SHINKAWA LTD. , TOHOKU UNIVERSITY
- Applicant Address: JP Tokyo
- Assignee: SHINKAWA LTD.,TOHOKU UNIVERSITY
- Current Assignee: SHINKAWA LTD.,TOHOKU UNIVERSITY
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JPJP2017-015745 20170131
- International Application: PCT/JP2018/002968 WO 20180130
- International Announcement: WO2018/143196 WO 20180809
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/00 ; H01L21/66

Abstract:
Provided is a bonding method for directly bonding an electrode part of a chip component to a bonding part provided on a substrate that is a bonding target, the method comprising: a step for placing the substrate on a stage inside a liquid vessel; a step for injecting liquid into the liquid vessel; and a step for bonding the electrode part of the chip component to the bonding part (electrode part) of the bonding target by superimposing the chip component held by a bonding head in the liquid stored in the liquid vessel over the bonding target and then applying pressure thereto.
Public/Granted literature
- US20200006282A1 SEMICONDUCTOR-DEVICE MANUFACTURING METHOD AND MANUFACTURING APPARATUS Public/Granted day:2020-01-02
Information query
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