Invention Grant
- Patent Title: Three-dimensional microelectronic package with embedded cooling channels
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Application No.: US16351757Application Date: 2019-03-13
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Publication No.: US10937764B2Publication Date: 2021-03-02
- Inventor: Kamal K. Sikka , Fee Li Lie , Kevin Winstel , Ravi K. Bonam , Iqbal Rashid Saraf , Dario Goldfarb , Daniel Corliss , Dinesh Gupta
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/48 ; H01L29/16 ; H01L23/46 ; H01L23/538 ; H01L23/00 ; H01L23/522

Abstract:
The subject disclosure relates to 3D microelectronic chip packages with embedded coolant channels. The disclosed 3D microelectronic chip packages provide a complete and practical mechanism for introducing cooling channels within the 3D chip stack while maintaining the electrical connection through the chip stack. According to an embodiment, a microelectronic package is provided that comprises a first silicon chip comprising first coolant channels interspersed between first thru-silicon-vias (TSVs). The microelectronic chip package further comprises a silicon cap attached to a first surface of the first silicon chip, the silicon cap comprising second TSVs that connect to the first TSVs. A second silicon chip comprising second coolant channels can further be attached to the silicon cap via interconnects formed between a first surface of the second silicon chip and the silicon cap, wherein the interconnects connect to the second TSVs.
Public/Granted literature
- US20200294968A1 THREE-DIMENSIONAL MICROELECTRONIC PACKAGE WITH EMBEDDED COOLING CHANNELS Public/Granted day:2020-09-17
Information query
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