Invention Grant
- Patent Title: Gate cut structures
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Application No.: US16134173Application Date: 2018-09-18
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Publication No.: US10937786B2Publication Date: 2021-03-02
- Inventor: Hui Zang , Ruilong Xie , Laertis Economikos
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/088 ; H01L29/08 ; H01L29/78 ; H01L29/66 ; H01L21/8234

Abstract:
The present disclosure generally relates to semiconductor structures and, more particularly, to gate cut structures and methods of manufacture. The structure includes: a plurality of gate structures comprising source and drain regions and sidewall spacers comprised of different dielectric materials; and contacts connecting to the source and drain regions and isolated from the gate structures by the different dielectric materials.
Public/Granted literature
- US20200091143A1 GATE CUT STRUCTURES Public/Granted day:2020-03-19
Information query
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