Invention Grant
- Patent Title: Three-dimensional memory device with on-axis self-aligned drain-select-level isolation structure and methods of manufacturing the same
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Application No.: US16352157Application Date: 2019-03-13
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Publication No.: US10937800B2Publication Date: 2021-03-02
- Inventor: Tae-Kyung Kim , Johann Alsmeier
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L21/308 ; H01L21/311 ; H01L21/3213 ; H01L21/762 ; H01L21/8234 ; H01L27/11556 ; H01L29/10

Abstract:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, memory openings vertically extending through the alternating stack, and memory stack structures located within a respective one of the memory openings. A multi-pillared dielectric isolation structure extends through upper sections of a neighboring pair of memory openings. The multi-pillared dielectric isolation structure includes a plurality of dielectric pillar portions located within a respective one of the memory openings, and at least one horizontally-extending portion adjoining each of the plurality of dielectric pillar portions and located between a vertically neighboring pair of insulating layers within the alternating stack. The at least one horizontally-extending portion laterally separates laterally neighboring strips of at least one electrically conductive layer within the alternating stack.
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