- Patent Title: Through array contact (TAC) for three-dimensional memory devices
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Application No.: US16867404Application Date: 2020-05-05
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Publication No.: US10937806B2Publication Date: 2021-03-02
- Inventor: Qian Tao , Yushi Hu , Zhenyu Lu , Li Hong Xiao , Xiaowang Dai , Yu Ting Zhou , Zhao Hui Tang , Mei Lan Guo , ZhiWu Tang , Qinxiang Wei , Qianbing Xu , Sha Sha Liu , Jian Hua Sun , EnBo Wang
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Hubei
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Hubei
- Agency: Sterne, Kessler, Goldstein & Fox P.L.C.C.
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/11582 ; H01L21/768 ; H01L23/522 ; H01L27/11565 ; H01L27/1157

Abstract:
Embodiments of interconnect structures of a three-dimensional (3D) memory device and method for forming the interconnect structures are disclosed. In an example, a 3D NAND memory device includes a semiconductor substrate, an alternating layer stack disposed on the semiconductor substrate, and a dielectric structure, which extends vertically through the alternating layer stack, on an isolation region of the substrate. Further, the alternating layer stack abuts a sidewall surface of the dielectric structure and the dielectric structure is formed of a dielectric material. The 3D memory device additionally includes one or more through array contacts that extend vertically through the dielectric structure and the isolation region, and one or more channel structures that extend vertically through the alternating layer stack.
Public/Granted literature
- US20200266211A1 THROUGH ARRAY CONTACT (TAC) FOR THREE-DIMENSIONAL MEMORY DEVICES Public/Granted day:2020-08-20
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