Invention Grant
- Patent Title: Vertical memory device and method of fabricating the same
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Application No.: US16536063Application Date: 2019-08-08
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Publication No.: US10937808B2Publication Date: 2021-03-02
- Inventor: Jae Gil Lee , Ju Ry Song , Hyangkeun Yoo , Se Ho Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Priority: KR10-2018-0171070 20181227
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L29/423 ; H01L29/417 ; H01L29/51 ; H01L29/66 ; H01L29/78 ; H01L21/28

Abstract:
A vertical memory device according to an aspect includes a substrate, a first gate electrode structure disposed on the substrate and a second gate electrode structure spaced apart from the first gate electrode structure in a first direction substantially perpendicular to the substrate, a channel contact electrode layer disposed between the first gate electrode structure and the second gate electrode structure, and a channel layer extending along the first direction and in contact with the channel contact electrode layers and the first and the second gate electrode structures.
Public/Granted literature
- US20200212068A1 VERTICAL MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2020-07-02
Information query
IPC分类: