Invention Grant
- Patent Title: Photoelectric conversion device and manufacturing method of the photoelectric conversion device
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Application No.: US16286284Application Date: 2019-02-26
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Publication No.: US10937822B2Publication Date: 2021-03-02
- Inventor: Mineo Shimotsusa , Masatsugu Itahashi , Yusuke Onuki , Nobuaki Kakinuma , Masato Fujita
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JPJP2014-222044 20141030
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A manufacturing method includes a first process for forming a first gate electrode for a first MOS transistor and a second gate electrode for a second MOS transistor on a substrate including a semiconductor region defined by an insulator region for element isolation, a second process for masking a portion located above the semiconductor region of the first gate electrode to introduce an impurity to a source-drain region of the first MOS transistor, and a third process for forming a first conductor member being in contact with the portion of the first gate electrode through a first hole disposed on an insulator member covering the substrate and a second conductor member being in contact with the second gate electrode through a second hole disposed on the insulator member.
Public/Granted literature
- US20190198537A1 PHOTOELECTRIC CONVERSION DEVICE AND MANUFACTURING METHOD OF THE PHOTOELECTRIC CONVERSION DEVICE Public/Granted day:2019-06-27
Information query
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