Invention Grant
- Patent Title: Pseudo-substrate for optoelectronic device and its manufacturing method
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Application No.: US16958142Application Date: 2018-11-21
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Publication No.: US10937827B2Publication Date: 2021-03-02
- Inventor: Ivan-Christophe Robin , Jérôme Napierala
- Applicant: ALEDIA
- Applicant Address: FR Grenoble
- Assignee: ALEDIA
- Current Assignee: ALEDIA
- Current Assignee Address: FR Grenoble
- Agency: Cantor Colburn LLP
- Priority: FR1763274 20171227
- International Application: PCT/FR2018/052936 WO 20181121
- International Announcement: WO2019/129945 WO 20190704
- Main IPC: H01L27/15
- IPC: H01L27/15 ; H01L33/12 ; H01L33/00 ; H01L33/32 ; H01L33/24

Abstract:
A pseudosubstrate for an optoelectronic device suitable for the growth of light-emitting diodes including a substrate and a buffer structure formed on an upper face of the substrate. The buffer structure includes at least one first portion wherein one layer made of solid gallium nitride (GaN) delimits at least one free surface of a first type facing away from the upper face of the substrate, each free surface of the first type being suitable for the growth on same of at least one light-emitting diode mostly based on a III-V compound capable of emitting light at a first wavelength. The buffer structure including at least one second portion wherein a stack alternating layers of indium and gallium nitride (InGaN) and intermediate layers of GaN and in which the indium is present in a first weight ratio, delimits at least one free surface of a second type facing away from the upper face of the substrate, each free surface of the second type being suited to the growth on same of at least one light-emitting diode mostly based on a III-V compound capable of emitting light at a second wavelength different from the first wavelength. The second portion of the buffer structure is offset relative to the first portion of the buffer structure in a general plane (P) oriented parallel to the plane of the upper face of the substrate. Also described is an optoelectronic device and a manufacturing method.
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