Invention Grant
- Patent Title: Fabricating embedded magnetoresistive random access memory device with v-shaped magnetic tunnel junction profile
-
Application No.: US16157970Application Date: 2018-10-11
-
Publication No.: US10937828B2Publication Date: 2021-03-02
- Inventor: Pouya Hashemi , Matthias Georg Gottwald , Alexander Reznicek , Chandrasekharan Kothandaraman
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Garg Law Firm, PLLC
- Agent Rakesh Garg; Robert Sullivan
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/08 ; H01L43/10 ; H01L43/02 ; H01L43/12 ; G11C11/15 ; G11C11/56 ; G11C11/16

Abstract:
Fabricating a magnetoresistive random access memory (MRAM) device includes receiving a wafer structure having a first inter-layer dielectric (ILD) layer and a metal material disposed within the first ILD layer. A second ILD layer is deposited upon a top surface of the first ILD layer and the metal material. A trench is formed within the second ILD layer extending to the top surface of the metal material. A plurality of magnetic stack layers of a magnetic stack and an electrode layer are deposited within the trench. Portions of each of the magnetic stack layers of the magnetic stack and the electrode layer are removed to form a v-shaped magnetic tunnel junction (MTJ) in contact with the metal material.
Information query
IPC分类: