Invention Grant
- Patent Title: Method for producing a semiconductor device having a fin-shaped semiconductor layer
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Application No.: US15968991Application Date: 2018-05-02
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Publication No.: US10937902B2Publication Date: 2021-03-02
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/3105 ; H01L21/3213 ; H01L29/66 ; H01L29/417 ; H01L29/08 ; H01L29/423

Abstract:
A semiconductor-device production method includes a first step of forming a fin-shaped semiconductor layer on a semiconductor substrate and forming a first insulating film around the fin-shaped semiconductor layer, and a second step of, after the first step, forming a second insulating film around the fin-shaped semiconductor layer, depositing a first polysilicon on the second insulating film to achieve planarization, forming, in a direction perpendicular to a direction of the fin-shaped semiconductor layer, a second resist for forming a first gate line and a first pillar-shaped semiconductor layer and a third resist for forming a first contact line and a second pillar-shaped semiconductor layer, and etching the first polysilicon, the second insulating film, and the fin-shaped semiconductor layer to form the first pillar-shaped semiconductor layer, a first dummy gate formed from the first polysilicon, the second pillar-shaped semiconductor layer, and a second dummy gate formed from the first polysilicon.
Public/Granted literature
- US20180248038A1 METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE Public/Granted day:2018-08-30
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