Invention Grant
- Patent Title: Magnetoresistive element having a novel cap multilayer
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Application No.: US16686081Application Date: 2019-11-15
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Publication No.: US10937958B2Publication Date: 2021-03-02
- Inventor: Yimin Guo
- Applicant: Yimin Guo
- Applicant Address: US CA San Jose
- Assignee: Yimin Guo
- Current Assignee: Yimin Guo
- Current Assignee Address: US CA San Jose
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L43/02 ; H01L43/10 ; H01L27/22 ; H01L43/14 ; H01L43/06

Abstract:
A method of forming a magnetoresistive element comprises of forming a novel Boron-absorbing cap layer provided on the top surface of an amorphous CoFeB (or CoB, FeB) ferromagnetic recording layer. As the magnetoresistive film is thermally annealed, a crystallization process occurs to form bcc CoFe grains having epitaxial growth with (100) plane parallel to the surface of the tunnel barrier layer as Boron elements migrate into the novel Boron-absorbing cap layer. Removing the top portion of the Boron-absorbing cap layer by means of sputtering etch or RIE etch processes followed by optional oxidization process, a thin thermally stable portion of cap layer is remained on top of the recording layer with low damping constant. Accordingly, a reduced write current is achieved for spin-transfer torque MRAM application.
Public/Granted literature
- US20200083437A1 MAGNETORESISTIVE ELEMENT HAVING A NOVEL CAP MULTILAYER Public/Granted day:2020-03-12
Information query
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