Invention Grant
- Patent Title: Vertical cavity surface emitting laser and method for manufacturing vertical cavity surface emitting laser
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Application No.: US16555599Application Date: 2019-08-29
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Publication No.: US10938181B2Publication Date: 2021-03-02
- Inventor: Kei Fujii , Takamichi Sumitomo , Suguru Arikata
- Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Applicant Address: JP Osaka
- Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell, LLP.
- Priority: JPJP2018-163390 20180831
- Main IPC: H01S5/00
- IPC: H01S5/00 ; H01S5/22 ; H01S5/183 ; H01S5/343 ; H01S5/125 ; H01S5/187 ; H01S5/30

Abstract:
A vertical cavity surface emitting laser includes: an active layer including a quantum well structure including one or more well layers including a III-V compound semiconductor containing indium as a group III constituent element; an upper laminated region containing a carbon dopant; and a substrate for mounting a post including the active layer and the upper laminated region, in which the active layer is provided between the upper laminated region and the substrate, the quantum well structure has a carbon concentration of 2×1016 cm−3 or less, and the upper laminated region includes a pile-up layer of indium at a position away from the active layer.
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