Invention Grant
- Patent Title: Acoustic wave resonator, acoustic wave device, and filter
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Application No.: US16390739Application Date: 2019-04-22
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Publication No.: US10938372B2Publication Date: 2021-03-02
- Inventor: Ryohei Komiyama , Hitoshi Tsukidate , Shinji Yamamoto
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Stein IP, LLC
- Priority: JPJP2018-095004 20180517,JPJP2019-020791 20190207
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/10 ; H03H9/145 ; H03H9/64 ; H03H9/72 ; B23K26/53 ; B23K26/00 ; H03H9/25 ; H01L41/338 ; H01L41/312

Abstract:
An acoustic wave resonator includes: a piezoelectric substrate; a pair of comb-shaped electrodes that is located on the piezoelectric substrate and excites an acoustic wave, each of the pair of comb-shaped electrodes including a plurality of electrode fingers; and a polycrystalline substrate that is located at an opposite side of the piezoelectric substrate from a surface on which the pair of comb-shaped electrodes is located, an average particle size of the polycrystalline substrate being equal to or less than 66 times an average pitch of the plurality of electrode fingers.
Public/Granted literature
- US20190356297A1 ACOUSTIC WAVE RESONATOR, ACOUSTIC WAVE DEVICE, AND FILTER Public/Granted day:2019-11-21
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