Invention Grant
- Patent Title: Laser processing apparatus
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Application No.: US16172959Application Date: 2018-10-29
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Publication No.: US10940560B2Publication Date: 2021-03-09
- Inventor: Keiji Nomaru , Yuji Hadano , Masatoshi Nayuki
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JPJP2017-210657 20171031
- Main IPC: B23K26/142
- IPC: B23K26/142 ; H01L21/687 ; B23K26/08 ; B23K26/359 ; B23K26/122 ; H01L21/67 ; B23K26/146 ; B23K26/364 ; B23K26/38 ; H01L21/82 ; B23K26/06 ; B23K26/046 ; B23K26/12 ; B23K26/082 ; B23K103/00 ; B23K101/40

Abstract:
A liquid supply mechanism is disposed on an upper portion of a holding unit of a laser processing apparatus. The liquid supply mechanism includes: a liquid chamber having a transparent plate positioned such that a gap is formed between the transparent plate and the top surface of a workpiece held on a holding table; a linear-motion mechanism configured to linearly move the transparent plate over the liquid chamber; a liquid supply nozzle configured to supply a liquid from one side of the liquid chamber to the gap; and a liquid discharge nozzle configured to discharge the liquid from another side of the liquid chamber. A laser beam irradiating unit includes a laser oscillator configured to irradiate the workpiece through the transparent plate and the liquid supplied to the gap.
Public/Granted literature
- US20190126397A1 LASER PROCESSING APPARATUS Public/Granted day:2019-05-02
Information query
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