Invention Grant
- Patent Title: Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components
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Application No.: US15784058Application Date: 2017-10-13
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Publication No.: US10941303B2Publication Date: 2021-03-09
- Inventor: Mats Larsson , Yogita Pareek , Jianqi Wang , Kevin A. Papke
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: B32B9/00
- IPC: B32B9/00 ; C09D5/08 ; H01L21/683 ; B05D1/18 ; C09D1/00 ; H01J37/32 ; H01L21/67
Abstract:
Embodiments of the disclosure provide a chamber component for use in a plasma processing chamber apparatus. The chamber component may include a coating layer that provides a fluorine-rich surface. In one embodiment, a chamber component, for use in a plasma processing apparatus, includes a body having an outer layer comprising yttria having a coating layer formed thereon, wherein the coating layer comprises a yttrium fluoride containing material.
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