Invention Grant
- Patent Title: Plating method and plating apparatus
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Application No.: US16379416Application Date: 2019-04-09
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Publication No.: US10941504B2Publication Date: 2021-03-09
- Inventor: Yusuke Tamari , Akira Owatari , Mizuki Nagai , Shingo Yasuda
- Applicant: Ebara Corporation
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Main IPC: C25D21/12
- IPC: C25D21/12 ; C25D7/12 ; C25D21/14 ; C25D5/02 ; C25D17/00 ; C25D21/10

Abstract:
A plating method capable of controlling a concentration of an additive within a proper range during plating of a substrate is disclosed. The plating method includes: disposing an anode and a substrate, having a via-hole formed in a surface thereof, so as to face each other in a plating solution containing an additive; applying a voltage between the anode and the substrate for filling the via-hole with metal; measuring the voltage applied to the substrate; calculating an amount of change in the voltage per predetermined time; and adjusting a concentration of the additive in the plating solution to keep the amount of change in the voltage within a predetermined control range.
Public/Granted literature
- US20190233967A1 PLATING METHOD AND PLATING APPARATUS Public/Granted day:2019-08-01
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