- Patent Title: Apparatus and method for measuring amplitude of scanning reflector
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Application No.: US16321592Application Date: 2017-07-27
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Publication No.: US10942063B2Publication Date: 2021-03-09
- Inventor: Xinghai Wang , Mingbo Yuan , Haijiang Wang
- Applicant: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee Address: CN Shanghai
- Agency: Muncy, Geissler, Olds & Lowe, PC
- Priority: CN201610614644.9 20160729
- International Application: PCT/CN2017/094614 WO 20170727
- International Announcement: WO2018/019265 WO 20180201
- Main IPC: H01J3/14
- IPC: H01J3/14 ; G01J1/42 ; G02B26/08 ; G02B26/10 ; G03F9/00 ; G03F7/20

Abstract:
A device and method for measuring amplitude of a scanning mirror are disclosed. The device includes a light source (20) for outputting an optical signal; a diaphragm (21) for modifying size and shape of a light spot of the optical signal output by the light source (20); a scanning mirror retainer for placing a scanning mirror (22) to be measured, the scanning mirror, after being retained, being able to periodically reflect the optical signal; a photoelectric sensor (23) including three or more sensing elements and configured to detect and collect the optical signal reflected by the scanning mirror (22); and a signal acquisition and processing unit (24) for processing a signal collected by the photoelectric sensor (23) to derive an amplitude of the scanning mirror (22). Therefore, it is possible to characterize the scanning mirror (22) before the scanning mirror (22) is used, determining performance of the scanning mirror (22).
Public/Granted literature
- US20190310133A1 APPARATUS AND METHOD FOR MEASURING AMPLITUDE OF SCANNING REFLECTOR Public/Granted day:2019-10-10
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