Invention Grant
- Patent Title: Inspection apparatus and inspection method
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Application No.: US16320955Application Date: 2017-06-16
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Publication No.: US10942131B2Publication Date: 2021-03-09
- Inventor: Yasushi Nagata
- Applicant: SCREEN HOLDINGS CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: SCREEN HOLDINGS CO., LTD.
- Current Assignee: SCREEN HOLDINGS CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: McDermott Will & Emery LLP
- Priority: JPJP2016-160429 20160818
- International Application: PCT/JP2017/022333 WO 20170616
- International Announcement: WO2018/034051 WO 20180222
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01B11/30

Abstract:
A first imaging unit images a first region to be subjected to mirror finish treatment of an inspection region of a surface of the object. A second imaging unit images a second region not to be subjected to the mirror finish treatment of the inspection region of the surface of the object. An inspection unit inspects a form of the first region based on a first picked-up image taken by the first imaging unit, and a form of the second region based on a second picked-up image taken by the second imaging unit. During imaging, a holder holds the object so as to have a positional relationship in which the first region has a normal along a first direction rather than a second direction.
Public/Granted literature
- US20190178811A1 INSPECTION APPARATUS AND INSPECTION METHOD Public/Granted day:2019-06-13
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