Invention Grant
- Patent Title: Multi-parametric sensor with bridge structure
-
Application No.: US16346205Application Date: 2017-10-30
-
Publication No.: US10942141B2Publication Date: 2021-03-09
- Inventor: Matthias Merz , Mark Hornung , Felix Hoehne
- Applicant: SENSIRION AG
- Applicant Address: CH Stäfa
- Assignee: SENSIRION AG
- Current Assignee: SENSIRION AG
- Current Assignee Address: CH Stäfa
- Agency: Ladas & Parry LLP
- Priority: EP16196586 20161031
- International Application: PCT/EP2017/077806 WO 20171030
- International Announcement: WO2018/078165 WO 20180503
- Main IPC: G01N27/18
- IPC: G01N27/18 ; G01N27/12 ; H05B3/22

Abstract:
The disclosure relates to a sensor for detecting and/or analysing a gas. The sensor comprises a substrate, a recess or opening arranged in the substrate, a first bridge structure and a second bridge structure. The first bridge structure and the second bridge structure extend over said recess or opening and are anchored in the substrate. The first bridge structure forms a first hotplate and comprises a first patch of sensing material, in particular of a metal oxide material, arranged on the first hotplate, electrodes adapted to measure an electrical property of the first patch and a heater adapted to heat the first hotplate. The second bridge structure comprises a temperature sensor. The sensor comprises circuitry for driving the heater and for processing signals from the electrodes and the temperature sensor. The sensor provides a first operation mode configured to perform a measurement of an electrical property of the first patch and a second operation mode configured to operate the second bridge structure in a sensing mode to perform a measurement of a thermal property of the gas. The thermal property is a thermal capacity and/or a thermal conductivity and/or a thermal diffusivity of the gas.
Public/Granted literature
- US20190293590A1 MULTI-PARAMETRIC SENSOR WITH BRIDGE STRUCTURE Public/Granted day:2019-09-26
Information query