Invention Grant
- Patent Title: Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
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Application No.: US16865709Application Date: 2020-05-04
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Publication No.: US10942457B2Publication Date: 2021-03-09
- Inventor: Mineyuki Nishino , Katsushi Nakano , Satoshi Takahashi
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03F7/20
Abstract:
An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.
Public/Granted literature
Information query
