Invention Grant
- Patent Title: Exposure system, exposure device and exposure method
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Application No.: US15999783Application Date: 2017-02-17
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Publication No.: US10942458B2Publication Date: 2021-03-09
- Inventor: Ke Lan , Yaping Ge , Yonghui Chen
- Applicant: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee Address: CN Shanghai
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: CN201610092322.2 20160218
- International Application: PCT/CN2017/073957 WO 20170217
- International Announcement: WO2017/140265 WO 20170824
- Main IPC: G03F7/20
- IPC: G03F7/20 ; B23K26/00 ; B23K26/402 ; B23K26/073 ; B23K26/36 ; B23K26/046 ; B23K26/042 ; B23K26/352 ; B23K26/50 ; B23K26/08 ; B23K103/00 ; B23K101/40

Abstract:
An exposure system (10), an exposure apparatus and an exposure method are disclosed. The exposure system (10) includes: a laser unit (11), a light spot switching unit (12) and a lens unit (13); the laser unit (11) is configured for producing a laser beam; the light spot switching unit (12) is configured to direct the laser beam to travel along one of different optical paths based on a desired size of a light spot for a workpiece to be exposed so that a laser beam in correspondence with the desired size of the light spot is obtained; and the lens unit (13) is configured for altering a direction in which the laser beam is incident on the workpiece. The light spot switching unit (12) enables the laser beam to be switched between the different optical paths so as to form light spots sized in different ranges, which can satisfy different needs of workpieces with various critical dimensions. As a result, an improvement in processing adaptability to different workpieces and a significant reduction in cost can be achieved.
Public/Granted literature
- US20190163074A1 EXPOSURE SYSTEM, EXPOSURE DEVICE AND EXPOSURE METHOD Public/Granted day:2019-05-30
Information query
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