Invention Grant
- Patent Title: Laser processing method
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Application No.: US15974147Application Date: 2018-05-08
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Publication No.: US10943801B2Publication Date: 2021-03-09
- Inventor: Koichi Shigematsu
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JPJP2017-093017 20170509
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B23K26/38 ; B23K26/402 ; H01L21/683 ; B23K26/03 ; B23K26/0622 ; B23K26/08 ; B23K26/364 ; B23K103/16 ; B23K101/40 ; B23K103/00

Abstract:
A laser processing method includes a step of holding a film side of a workpiece which has been divided into chips and whose reverse side carries an adhesive film stuck thereto, a step of detecting widths of grooves in the workpiece at predetermined chip intervals and central coordinates of the widths of the grooves, a step of calculating laser beam irradiation lines based on the detected widths of the grooves and the detected central coordinates, a step of determining misalignment levels of the calculated laser beam irradiation lines according to misalignments of the grooves in widthwise directions thereof, and a step of processing the adhesive film with a laser beam by applying the laser beam to the adhesive film at bottoms of the grooves along the laser beam irradiation lines, thereby separating the adhesive film.
Public/Granted literature
- US20180330972A1 LASER PROCESSING METHOD Public/Granted day:2018-11-15
Information query
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