Invention Grant
- Patent Title: Ceramic electrostatic chuck having a V-shape seal band
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Application No.: US15361365Application Date: 2016-11-25
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Publication No.: US10943808B2Publication Date: 2021-03-09
- Inventor: Hamid Noorbakhsh , Ippei Nakagawa , Nobuhiro Yoshida
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/683 ; H01L21/687

Abstract:
Implementations described herein provide a substrate support assembly that includes a seal band. The seal band protects an adhesive layer that is disposed between an electrostatic chuck (ESC) and a cooling plate of the substrate support assembly. In one example, a substrate support assembly includes an electrostatic chuck and a cooling plate. A bonding layer secures a bottom surface of the electrostatic chuck to a top surface of the cooling plate. The bonding layer has an adhesive layer and a seal band. The seal band circumscribes and protects the adhesive layer. The seal band has a ring shaped body. The ring shaped body has a top surface connected to a bottom surface by an inner surface and an outer surface. The top surface and the bottom surface angled less than 85 degrees from the inner surface. The outer surface has an indent formed therein.
Public/Granted literature
- US20180151402A1 CERAMIC ELECTROSTATIC CHUCK HAVING A V-SHAPE SEAL BAND Public/Granted day:2018-05-31
Information query
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