Invention Grant
- Patent Title: Residue-free metal gate cutting for fin-like field effect transistor
-
Application No.: US16665252Application Date: 2019-10-28
-
Publication No.: US10943828B2Publication Date: 2021-03-09
- Inventor: Ya-Yi Tsai , Yi-Hsuan Hsiao , Shu-Yuan Ku , Ryan Chia-Jen Chen , Ming-Ching Chang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L27/088

Abstract:
Metal gate cutting techniques for fin-like field effect transistors (FinFETs) are disclosed herein. An exemplary method includes receiving an integrated circuit (IC) device structure that includes a substrate, one or more fins disposed over the substrate, a plurality of gate structures disposed over the fins, a dielectric layer disposed between and adjacent to the gate structures, and a patterning layer disposed over the gate structures. The gate structures traverses the fins and includes first and second gate structures. The method further includes: forming an opening in the patterning layer to expose a portion of the first gate structure, a portion of the second gate structure, and a portion of the dielectric layer; and removing the exposed portion of the first gate structure, the exposed portion of the second gate structure, and the exposed portion of the dielectric layer.
Public/Granted literature
- US20200058557A1 Residue-Free Metal Gate Cutting For Fin-Like Field Effect Transistor Public/Granted day:2020-02-20
Information query
IPC分类: