Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16564328Application Date: 2019-09-09
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Publication No.: US10943865B2Publication Date: 2021-03-09
- Inventor: Takamasa Ito
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2019-053331 20190320
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/522 ; H01L27/1157 ; H01L27/11582

Abstract:
According to one embodiment, a device includes: a semiconductor in a first region of interconnects stacked in a first direction; a first conductor including a first body and a first protrusion, the first body provided in a first region, the first protrusion protruding from the first body in a second direction and overlapping with a second region adjacent to the first region in the second direction; a plug on the first protrusion; a insulator between the plug and the interconnects; a second conductor including a second body and a second protrusion, the second body on the first body and contacting the semiconductor, and the second protrusion on the first protrusion and protruding to the second body; and a first layer on the first protrusion, contacting the second protrusion and the insulator, and extending between the second protrusion and the insulator.
Public/Granted literature
- US20200303305A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-09-24
Information query
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