Invention Grant
- Patent Title: Semiconductor-on-insulator finFET devices with high thermal conductivity dielectrics
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Application No.: US15956209Application Date: 2018-04-18
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Publication No.: US10943924B2Publication Date: 2021-03-09
- Inventor: Choonghyun Lee , Sanghoon Shin , Takashi Ando
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Erik Johnson
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L23/473 ; H01L21/762 ; H01L27/088 ; H01L29/06 ; H01L29/10

Abstract:
In accordance with embodiments of the present invention, a semiconductor device and method for forming a semiconductor device is described. The semiconductor device includes a substrate, including a buried dielectric layer between a base substrate and semiconductor layer. A fin is formed in the semiconductor substrate and having source and drain regions formed adjacent to each side of a gate structure. A heat conducting dielectric encapsulating a lower portion of the fin and source and drain regions above the buried dielectric layer to transfer heat away from the gate structure.
Public/Granted literature
- US20190326324A1 SEMICONDUCTOR-ON-INSULATOR FINFET DEVICES WITH HIGH THERMAL CONDUCTIVITY DIELECTRICS Public/Granted day:2019-10-24
Information query
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