Invention Grant
- Patent Title: Image sensor comprising reflective guide layer and method of forming the same
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Application No.: US16390126Application Date: 2019-04-22
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Publication No.: US10943940B2Publication Date: 2021-03-09
- Inventor: Wei Chuang Wu , Jhy-Jyi Sze , Yu-Jen Wang , Yen-Chang Chu , Shyh-Fann Ting , Ching-Chun Wang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/02 ; H01L21/311

Abstract:
Various structures of image sensors are disclosed, as well as methods of forming the image sensors. According to an embodiment, a structure comprises a substrate comprising photo diodes, an oxide layer on the substrate, recesses in the oxide layer and corresponding to the photo diodes, a reflective guide material on a sidewall of each of the recesses, and color filters each being disposed in a respective one of the recesses. The oxide layer and the reflective guide material form a grid among the color filters, and at least a portion of the oxide layer and a portion of the reflective guide material are disposed between neighboring color filters.
Public/Granted literature
- US20190252451A1 Image Sensor Comprising Reflective Guide Layer and Method of Forming the Same Public/Granted day:2019-08-15
Information query
IPC分类: