- Patent Title: Integrated assemblies having a portion of a transistor gate extending into a recessed region of a semiconductor base, and methods of forming integrated assemblies
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Application No.: US16124734Application Date: 2018-09-07
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Publication No.: US10944002B2Publication Date: 2021-03-09
- Inventor: Masahiro Yokomichi
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/423 ; H01L29/51
Abstract:
Some embodiments include an integrated assembly with a semiconductor base having a horizontally-extending upper surface, and having a recessed region. A transistor gate is supported by the semiconductor base. The transistor gate has a first segment over the horizontally-extending upper surface, and has a second segment over the recessed region. The first segment has a first vertically-extending surface along an outer edge. The second segment has a ledge along an edge of the recessed region. The ledge has an upper surface which is lower than the horizontally-extending upper surface. The second segment has a second vertically-extending surface extending upwardly from an inner portion of the ledge. A first spacer is along the first vertically-extending surface. A second spacer is along the second vertically-extending surface. The second spacer has a bottom edge beneath the horizontally-extending upper surface of the base.
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