Invention Grant
- Patent Title: Electrostatic chuck filter box and mounting bracket
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Application No.: US16906301Application Date: 2020-06-19
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Publication No.: US10944374B2Publication Date: 2021-03-09
- Inventor: Miguel Benjamin Vasquez , Jeremy Jerome Pool , Damien Martin Slevin
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Beyer Law Group LLP
- Main IPC: H03H7/01
- IPC: H03H7/01 ; H01L21/683 ; H03H3/00 ; H05K7/20 ; H01R43/26 ; H01R13/629

Abstract:
An apparatus and method electrically coupling an electrostatic chuck RF filter box with a pedestal lift. The RF filter box has a contact block and at least one alignment feature on an outer mating surface of the RF filter block. The contact block includes self-aligning electrical connectors and the alignment feature is configured for aligning self-aligning electrical connectors with corresponding electrical connectors on the bracket of the pedestal lift such that the self-aligning electrical connectors and the corresponding electrical connectors on the bracket of the pedestal lift automatically mate when the contact block is mounted to the bracket of the pedestal lift.
Public/Granted literature
- US20200321934A1 ELECTROSTATIC CHUCK FILTER BOX AND MOUNTING BRACKET Public/Granted day:2020-10-08
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