Invention Grant
- Patent Title: Device and method of fabricating such a device
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Application No.: US15772983Application Date: 2016-11-04
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Publication No.: US10947107B2Publication Date: 2021-03-16
- Inventor: Aravind Vijayaraghavan , Christian Berger
- Applicant: The University of Manchester
- Applicant Address: GB Manchester
- Assignee: The University of Manchester
- Current Assignee: The University of Manchester
- Current Assignee Address: GB Manchester
- Agency: Nixon Peabody LLP
- Agent Linda B. Huber
- Priority: GB1519620 20151106
- International Application: PCT/GB2016/053457 WO 20161104
- International Announcement: WO2017/077331 WO 20170511
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; H01H1/00 ; H01L29/16
Abstract:
There is disclosed a device and method for fabricating such a device. The device includes cavities formed in a substrate. A laminated membrane is mounted to the substrate and spans the cavities. The laminated membrane includes a layer of a flexible material, typically a polymer, and a layer of a two-dimensional material that is typically graphene.
Public/Granted literature
- US20180327252A1 DEVICE AND METHOD OF FABRICATING SUCH A DEVICE Public/Granted day:2018-11-15
Information query
