Invention Grant
- Patent Title: MEMS gyroscopes with in-line springs and related systems and methods
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Application No.: US15946119Application Date: 2018-04-05
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Publication No.: US10948294B2Publication Date: 2021-03-16
- Inventor: Jeffrey A. Gregory , Charles Blackmer
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G01C19/5712
- IPC: G01C19/5712 ; G01C19/5747

Abstract:
Microelectromechanical systems (MEMS) devices (such as gyroscopes) configured to reject quadrature motion are described. Quadrature motion arises for example when the drive motion of a gyroscope couples to the sense motion of a gyroscope even in the absence of an angular motion. In some circumstances, quadrature motion may result from the fact that the springs used in a gyroscope have slanted sidewall, which can impart torque in the mechanics of the gyroscope. MEMS gyroscope of the type described herein may be configured to reject quadrature motion by using only springs oriented substantially parallel to the drive direction. One such spring includes only beams parallel the drive directions, and optionally. These MEMS gyroscopes may be used to sense, among others, roll and pitch angular rates.
Public/Granted literature
- US20190310087A1 MEMS GYROSCOPES WITH IN-LINE SPRINGS AND RELATED SYSTEMS AND METHODS Public/Granted day:2019-10-10
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