Invention Grant
- Patent Title: Non-contact displacement sensor
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Application No.: US16527486Application Date: 2019-07-31
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Publication No.: US10948334B2Publication Date: 2021-03-16
- Inventor: Koji Kubo
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JPJP2018-148386 20180807
- Main IPC: G01F23/292
- IPC: G01F23/292 ; G01J1/32

Abstract:
A non-contact displacement sensor includes a focus timing calculator that, calculates a measurement-side focus timing at which measurement light is focused on a surface of a measurable object, a first reference-side focus timing at which reference light is focused on a first reference surface, and a second reference-side focus timing at which the reference light is focused on a second reference surface; a characteristics calculator that calculates the refractive index characteristics of a liquid lens apparatus based on the first reference-side focus timing, the second reference-side focus timing, and an optical path length difference; and a position calculator that calculates a position of the measurable object based on the refractive index characteristics and a phase of the measurement-side focus timing relative to a period of a drive signal.
Public/Granted literature
- US20200049545A1 NON-CONTACT DISPLACEMENT SENSOR Public/Granted day:2020-02-13
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