Invention Grant
- Patent Title: Wavelength dispersive X-ray fluorescence spectrometer
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Application No.: US16370363Application Date: 2019-03-29
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Publication No.: US10948436B2Publication Date: 2021-03-16
- Inventor: Shuichi Kato , Takashi Yamada , Yoshiyuki Kataoka
- Applicant: Rigaku Corporation
- Applicant Address: JP Tokyo
- Assignee: Rigaku Corporation
- Current Assignee: Rigaku Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPJP2016-194356 20160930
- Main IPC: G01N23/223
- IPC: G01N23/223 ; G01N23/2209

Abstract:
A wavelength dispersive X-ray fluorescence spectrometer includes a single one-dimensional detector (10) having detection elements (7) arranged linearly, and includes a detector position change mechanism (11) for setting a position of the one-dimensional detector (10) to either a parallel position at which an arrangement direction of the detection elements (7) is parallel to a spectral angle direction of a spectroscopic device (6) or an intersection position at which the arrangement direction intersects the spectral angle direction. At the parallel position, a receiving surface of the one-dimensional detector (10) is located at a focal point of focused secondary X-rays (42). At the intersection position, a receiving slit (9) is disposed at the focal point of the focused secondary X-rays (42), and the receiving surface is located at a traveling direction side of the focused secondary X-rays (42) farther from the spectroscopic device (6) than the receiving slit (9).
Public/Granted literature
- US20190227008A1 WAVELENGTH DISPERSIVE X-RAY FLUORESCENCE SPECTROMETER Public/Granted day:2019-07-25
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