Invention Grant
- Patent Title: Dispensing nozzle design and dispensing method thereof
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Application No.: US16124579Application Date: 2018-09-07
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Publication No.: US10948824B2Publication Date: 2021-03-16
- Inventor: Wei Chang Cheng , Chi-Hung Liao
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: B05B1/00
- IPC: B05B1/00 ; G03F7/16 ; H01L21/027

Abstract:
An apparatus for dispensing fluid includes a fluid source; a nozzle having an inner layer and an outer layer, the inner layer defining a bore in fluid communication with the fluid source; and a plurality of pins each moveable to be in physical contact with the outer layer, wherein the plurality of pins is operable to apply a force towards the outer layer to adjust a cross-section of the bore.
Public/Granted literature
- US20200004153A1 Dispensing Nozzle Design and Dispensing Method Thereof Public/Granted day:2020-01-02
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