Invention Grant
- Patent Title: Asymmetric gate cut isolation for SRAM
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Application No.: US16515913Application Date: 2019-07-18
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Publication No.: US10950610B2Publication Date: 2021-03-16
- Inventor: Bipul C. Paul , Ruilong Xie , Julien Frougier , Daniel Chanemougame , Hui Zang
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L21/8238 ; H01L29/06 ; H01L29/423 ; H01L29/49 ; H01L29/786 ; H01L29/66 ; H01L21/02 ; H01L21/28 ; H01L27/092

Abstract:
Methods of forming a gate cut isolation for an SRAM include forming a first and second active nanostructures adjacent to each other and separated by a space; forming a sacrificial liner over at least a side of the first active nanostructure facing the space, causing a first distance between a remaining portion of the space and the first active nanostructure to be greater than a second distance between the remaining portion of the space and the second active nanostructure. A gate cut isolation is formed in the remaining portion of the space such that it is closer to the second active nanostructure than the first active nanostructure. The sacrificial liner is removed, and gates formed over the active nanostructures with the gates separated from each other by the gate cut isolation. An SRAM including the gate cut isolation and an IC structure including the SRAM are also included.
Public/Granted literature
- US20210020644A1 ASYMMETRIC GATE CUT ISOLATION FOR SRAM Public/Granted day:2021-01-21
Information query
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