- Patent Title: Three dimensional semiconductor memory with residual memory layer
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Application No.: US15981928Application Date: 2018-05-17
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Publication No.: US10950612B2Publication Date: 2021-03-16
- Inventor: Sunggil Kim , Sangsoo Lee , Seulye Kim , Hongsuk Kim , Jintae Noh , Ji-Hoon Choi , Jaeyoung Ahn , Sanghoon Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Volentine, Whitt & Francos, PLLC
- Priority: KR10-2017-0116114 20170911
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11582 ; H01L29/78 ; G11C16/04 ; H01L29/66 ; H01L27/1157 ; H01L27/11565 ; H01L27/11573 ; H01L27/11575

Abstract:
A semiconductor memory device has a plurality of gates vertically stacked on a top surface of a substrate, a vertical channel filling a vertical hole that extends vertically through the plurality of gates, and a memory layer in the vertical hole and surrounding the vertical channel. The vertical channel includes a bracket-shaped lower portion filling part of a recess in the top of the substrate and an upper portion extending vertically along the vertical hole and connected to the lower channel. At least one end of an interface between the lower and upper portions of the vertical channel is disposed at a level not than that of the top surface of the substrate.
Public/Granted literature
- US20190081054A1 SEMICONDUCTOR MEMORY DEVICES AND METHODS OF FABRICATING THE SAME Public/Granted day:2019-03-14
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