Invention Grant
- Patent Title: Layer cost scalable 3D phase change cross-point memory
-
Application No.: US16259746Application Date: 2019-01-28
-
Publication No.: US10950786B2Publication Date: 2021-03-16
- Inventor: Hsiang-Lan Lung , Erh-Kun Lai , Chiao-Wen Yeh
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L45/00
- IPC: H01L45/00 ; G11C13/00

Abstract:
A 3D memory includes a plurality of first access line levels, a plurality of second access line levels and a plurality of memory cell levels, the memory cell levels being disposed between corresponding first access line levels and second access line levels. The first access line levels include a plurality of first access lines extending in a first direction, and a plurality of remnants of a first sacrificial material disposed between the first access lines. The second access line levels include a plurality of second access lines extending in a second direction and a plurality of remnants of a second sacrificial material disposed between the second access lines. The memory cell levels include an array of memory pillars disposed in the cross-points between the first access lines and the second access lines in adjacent first and second access line levels.
Public/Granted literature
- US20190355903A1 LAYER COST SCALABLE 3D PHASE CHANGE CROSS-POINT MEMORY Public/Granted day:2019-11-21
Information query
IPC分类: