Invention Grant
- Patent Title: Composition for surface treatment and surface treatment method using the same
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Application No.: US16320432Application Date: 2017-06-13
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Publication No.: US10954479B2Publication Date: 2021-03-23
- Inventor: Yasuto Ishida
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Aichi
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Aichi
- Agency: Katten Muchin Rosenman LLP
- Priority: JPJP2016-146627 20160726
- International Application: PCT/JP2017/021835 WO 20170613
- International Announcement: WO2018/020878 WO 20180201
- Main IPC: C11D7/32
- IPC: C11D7/32 ; C11D7/36 ; H01L21/02 ; C11D3/36 ; H01L21/3105 ; C11D7/34 ; C11D11/00
Abstract:
The present invention relates to a composition for surface treatment including: a phosphonic acid compound containing two or more nitrogen atoms; and water, wherein the pH is 6 or less, and the composition for surface treatment is used for treating a surface of a polishing-completed object to be polished having a tungsten-containing layer. According to the present invention, there is provided a means capable of inhibiting dissolution of the tungsten-containing layer provided on a polishing-completed object to be polished when a surface treatment is performed.
Public/Granted literature
- US20190241842A1 COMPOSITION FOR SURFACE TREATMENT AND SURFACE TREATMENT METHOD USING THE SAME Public/Granted day:2019-08-08
Information query
