Invention Grant
- Patent Title: Gas sensor comprising a rotatable Fabry-Perot multilayer etalon
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Application No.: US16105448Application Date: 2018-08-20
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Publication No.: US10955336B2Publication Date: 2021-03-23
- Inventor: Christopher S. Gudeman , Jaquelin K. Spong
- Applicant: Innovative Micro Technology
- Applicant Address: US CA Goleta
- Assignee: Innovative Micro Technology
- Current Assignee: Innovative Micro Technology
- Current Assignee Address: US CA Goleta
- Agent Jaquelin K. Spong
- Main IPC: G01J3/26
- IPC: G01J3/26 ; G01J3/42 ; G01N21/3504 ; G01N21/25 ; G01N33/00 ; G01N21/35 ; G01N21/03 ; G01J3/12
Abstract:
Systems and methods for forming a compact gas sensor include a multilayer etalon as a wavelength discriminating element. The position of the etalon may be adjusted to tune its transmission profile. And embodiment directed to carbon dioxide detection is described.
Public/Granted literature
- US20190064060A1 GAS SENSOR USING ETALON Public/Granted day:2019-02-28
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