Invention Grant
- Patent Title: Electrochemical cleaning of test probes
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Application No.: US16299598Application Date: 2019-03-12
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Publication No.: US10955439B2Publication Date: 2021-03-23
- Inventor: Charles L. Arvin , David M. Audette , Grant Wagner
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Erik Johnson, Esq.
- Main IPC: G01R1/067
- IPC: G01R1/067 ; H01L21/67 ; G01R3/00 ; H01L51/50 ; G02B5/128 ; G06F3/044

Abstract:
A method of treating a material on a probe is provided. The method includes the steps of immersing a probe tip into a first fluid, wherein the probe tip includes one or more oxidized metallic fragments on a surface of the probe tip; polarizing the probe tip, through a counter electrode, with a negative current to reduce the one or more oxidized metallic fragments to one or more substantially unoxidized metallic fragments; removing the probe tip from the first fluid; immersing the probe in a second fluid, wherein the second fluid is a complexer for the one or more substantially unoxidized metallic fragments; and polarizing the probe tip with a positive current, through the counter electrode, wherein the positive current oxidizes the one or more substantially unoxidized metallic fragments.
Public/Granted literature
- US20200292577A1 ELECTROCHEMICAL CLEANING OF TEST PROBES Public/Granted day:2020-09-17
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