A semiconductor device including an electrically programmable fuse includes a substrate, a first electrode on the substrate, dielectric material on the first electrode, one or more second electrodes including a conductive material disposed on the first electrode between portions of the dielectric material, and one or more voids encapsulated by the conductive material such that the one or more voids have boundaries defined in part by portions of the conductive material corresponding to fuse links disposed between the one or more voids and the dielectric material.