Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16296001Application Date: 2019-03-07
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Publication No.: US10957702B2Publication Date: 2021-03-23
- Inventor: Atsushi Oga , Hideaki Harakawa , Satoshi Nagashima , Natsuki Fukuda
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2018-163559 20180831
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11582 ; H01L21/762 ; H01L21/311 ; H01L27/1157 ; H01L27/11524

Abstract:
According to an embodiment, a semiconductor memory device includes: a first stacked body including a first semiconductor layer, a first memory film, a second semiconductor layer and a first insulating layer; a joining member provided on the first semiconductor layer, the second semiconductor layer, and the first insulating layer; a first layer provided above the joining member and covering the first semiconductor layer and the first memory film; a second layer provided above the joining member, located away from the first layer as viewed in a second direction perpendicular to the first direction, and covering the second semiconductor layer and the second memory film; a second stacked body including a third semiconductor layer, a fourth semiconductor layer, a fourth memory film and a second insulating layer.
Public/Granted literature
- US20200075615A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-03-05
Information query
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