- Patent Title: Sensors based on a heterojunction bipolar transistor construction
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Application No.: US16299860Application Date: 2019-03-12
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Publication No.: US10957787B2Publication Date: 2021-03-23
- Inventor: Vibhor Jain , Joan Josep Giner de Haro , Qizhi Liu , You Qian , Humberto Campanella Pineda
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: H01L29/165
- IPC: H01L29/165 ; H01L29/737 ; H01L29/66 ; H01L29/06 ; H01L23/528 ; H01L21/768 ; G01N27/414

Abstract:
Transistor-based sensors and fabrication methods for a transistor-based sensor. A semiconductor layer is arranged over a substrate, and an interconnect structure is arranged over the semiconductor layer and the substrate. The semiconductor layer includes first sections composed of a semiconductor material, second sections composed of the semiconductor material, and cavities. The first sections have an alternating arrangement with the second sections in a lateral direction. The semiconductor material of the first sections is polycrystalline, and the semiconductor material of the second sections is single-crystal. First and second openings each extend in a vertical direction through the metallization levels of the interconnect structure to the semiconductor layer or through the substrate to the semiconductor layer. The first opening defines a first fluid inlet coupled to the cavities, and the second opening defines a first fluid outlet coupled to the cavities.
Public/Granted literature
- US20200295165A1 SENSORS BASED ON A HETEROJUNCTION BIPOLAR TRANSISTOR CONSTRUCTION Public/Granted day:2020-09-17
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