Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16277108Application Date: 2019-02-15
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Publication No.: US10957800B2Publication Date: 2021-03-23
- Inventor: Shunpei Yamazaki
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: JP Atsugi
- Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee Address: JP Atsugi
- Agency: Fish & Richardson P.C.
- Priority: JPJP2012-210230 20120924
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/786 ; H01L29/10

Abstract:
A transistor including an oxide semiconductor layer can have stable electrical characteristics. In addition, a highly reliable semiconductor device including the transistor is provided. A semiconductor device includes a multi-layer film including an oxide layer and an oxide semiconductor layer, a gate insulating film in contact with the multi-layer film, and a gate electrode overlapping with the multi-layer film with the gate insulating film provided therebetween. In the semiconductor device, the oxide semiconductor layer contains indium, the oxide semiconductor layer is in contact with the oxide layer, and the oxide layer contains indium and has a larger energy gap than the oxide semiconductor layer.
Public/Granted literature
- US11094830B2 Semiconductor device Public/Granted day:2021-08-17
Information query
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