Invention Grant
- Patent Title: Surface treatment liquid, surface treatment method, and method for suppressing pattern collapse
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Application No.: US16216261Application Date: 2018-12-11
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Publication No.: US10961422B2Publication Date: 2021-03-30
- Inventor: Shinji Kumada , Kenji Seki , Takumi Namiki
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JPJP2017-245116 20171221
- Main IPC: C09K3/18
- IPC: C09K3/18 ; H01L21/306 ; C07D233/58

Abstract:
A surface treatment liquid capable of hydrophobizing a surface of a treatment target without including a silylation agent, a surface treatment method using the liquid, and a method for suppressing pattern collapse, including surface treatment by the surface treatment method. The liquid contains a nitrogen-containing heterocyclic compound as a water-repelling agent. A compound including one or more hydrocarbon groups which may be substituted with a halogen atom in which a total number of carbon atoms of the one or more hydrocarbon group is three or more, is used as the nitrogen-containing heterocyclic compound. The liquid may include only a nitrogen-containing heterocyclic compound having the above-described predetermined structure, as a water-repelling agent.
Public/Granted literature
- US20190194512A1 SURFACE TREATMENT LIQUID, SURFACE TREATMENT METHOD, AND METHOD FOR SUPPRESSING PATTERN COLLAPSE Public/Granted day:2019-06-27
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