Invention Grant
- Patent Title: Concentration detection method and pressure-type flow rate control device
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Application No.: US16334848Application Date: 2017-09-27
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Publication No.: US10962513B2Publication Date: 2021-03-30
- Inventor: Masaaki Nagase , Kenji Aikawa , Kaoru Hirata , Takahiro Imai , Tetsuo Naritomi , Tsutomu Shinohara , Takahiro Matsuda , Kouji Nishino
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Agency: Studebaker & Brackett PC
- Priority: JPJP2016-189986 20160928
- International Application: PCT/JP2017/034956 WO 20170927
- International Announcement: WO2018/062270 WO 20180405
- Main IPC: G01F1/36
- IPC: G01F1/36 ; G01N9/26 ; G01N33/00 ; G05D7/06

Abstract:
A method for detecting the concentration of a specified gas contained in a mixed gas includes, in a pressure-type flow rate control device including a restriction portion, an upstream valve provided upstream of the restriction portion, and a pressure sensor for measuring the pressure between the restriction portion and the upstream valve, a step of flowing the mixed gas from the upstream side of the upstream valve in a state in which the pressure on the downstream side of the restriction portion is lower than the pressure on the upstream side of the restriction portion, a step of determining with a pressure sensor pressure drop characteristics occurring after the upstream valve is changed from an open to a closed state, and a step of determining the concentration of the specified gas in the mixed gas based on the pressure drop characteristics.
Public/Granted literature
- US20200018736A1 CONCENTRATION DETECTION METHOD AND PRESSURE-TYPE FLOW RATE CONTROL DEVICE Public/Granted day:2020-01-16
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