An optical waveguide structure including a bottom layer, a middle waveguide layer, and a top cladding layer is provided. The middle waveguide layer is disposed on the bottom layer. The top cladding layer is disposed on the middle waveguide layer and covers the middle waveguide layer. The refractive index of the middle waveguide layer is greater than that of the bottom layer, and is greater than that of the top cladding layer. The optical waveguide structure has a first end region and a second end region. The middle waveguide layer in the first end region has a first end having a width gradually decreased toward the second end region. The top cladding layer in the second end region has a second end having a width gradually decreased away from the first end region.