Invention Grant
- Patent Title: Package moisture control and leak mitigation for high vacuum sealed devices
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Application No.: US16234878Application Date: 2018-12-28
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Publication No.: US10968099B2Publication Date: 2021-04-06
- Inventor: Kathryn Anne Schuck , Kristofer Scott Oberascher
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Michelle F. Murray; Charles A. Brill; Frank D. Cimino
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B7/00

Abstract:
A device and method of forming the device that includes a first substrate having a cavity on a bottom surface of the first substrate and MEMS components formed on the first substrate and in the cavity; a second substrate having an upper surface; a first metal bond that extends around a perimeter of the cavity and forming a first connection between the bottom surface of first substrate and the upper surface of the second substrate; a second metal bond that extends around a perimeter of the first metal bond and spaced from the first metal bond, the second metal bond forming a second connection between the bottom surface of the first substrate and the upper surface of the second substrate; where the MEMS components are hermetically sealed between the first and second substrates. A getter agent can be between the first and second metal bonds.
Public/Granted literature
- US20200207614A1 PACKAGE MOISTURE CONTROL AND LEAK MITIGATION FOR HIGH VACUUM SEALED DEVICES Public/Granted day:2020-07-02
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