Invention Grant
- Patent Title: Magnetic bearing control device and vacuum pump
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Application No.: US16055056Application Date: 2018-08-04
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Publication No.: US10968949B2Publication Date: 2021-04-06
- Inventor: Junichiro Kozaki
- Applicant: SHIMADZU CORPORATION
- Applicant Address: JP Kyoto
- Assignee: SHIMADZU CORPORATION
- Current Assignee: SHIMADZU CORPORATION
- Current Assignee Address: JP Kyoto
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: JPJP2017-169715 20170904
- Main IPC: F16C32/04
- IPC: F16C32/04 ; H02K5/24 ; H02P1/00 ; H02K7/09

Abstract:
A first arithmetic section calculates a current rotation component phase value and a current rotation component amplitude value. A second arithmetic section calculates a displacement rotation component phase value and a displacement rotation component amplitude value. A third arithmetic section calculates a ratio between the amplitude value of the current rotation frequency component and the amplitude value of the displacement rotation frequency component. Feedback control is performed such that the current rotation component phase value is equal to a value obtained by addition of a phase value of 180 degrees to the displacement rotation component phase value and that the amplitude value of the current rotation frequency component is equal to a product of the displacement rotation frequency component and the ratio.
Public/Granted literature
- US20190072131A1 MAGNETIC BEARING CONTROL DEVICE AND VACUUM PUMP Public/Granted day:2019-03-07
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