A physical quantity sensor includes a movable body and first and second detection electrodes facing the movable body with a separation distance between the movable body and the second detection electrode that is different from that between the movable body and the first detection electrode. The movable body and the first detection electrode are aligned to face one another in a first direction. Vibration of the movable body includes a drive vibration mode in which vibration in the first direction and vibration in a second direction orthogonal to the first direction are combined. To account for this drive vibration mode, an area of the second detection electrode is shifted to be greater in the second direction from its center in a plan view.